6

Comparison of Boron diffused emitters from BN, BSoD and H 3 BO 3 dopants

Year:
2016
Language:
english
File:
PDF, 1.56 MB
english, 2016
10

Impact of moisture trapping in emitter formation with boron spin on dopant source

Year:
2017
Language:
english
File:
PDF, 511 KB
english, 2017